MEMs Charged Particle Spectrometers for Spaceborne Applications Fred A. Herrero Detector Systems Branch Code 553/NASA GSFC Abstract The need to miniaturize charged-particle spectrometers for NASA space missions led to a MEMs approach that offers very large miniaturization factors (10 to 100) without loss in in sensitivity and energy/angle resolution. Combining a high transmission collimator channel array and a parallel plate energy analyzer (PPA) array defines a single pixel with its own look-angle and field-of-view; typical pixel dimensions are 3 to 5 mm thick with 0.5 to 2 cm square base and aperture area 0.01 to 0.4 cm^2, depending on energy resolution. Pixelated imaging plasma spectrometers can be built for ions or electrons with energy range from a few eV to about 50 keV using 500 volt scanning supplies (plate factors from 5 to 100 are practical). This Flat Plasma Spectrometer (FlaPS) geometry may be used also to obtain neutral-winds, ion-drifts, and temperatures from the angular and energy distributions of the high ion and neutral fluxes measured in low-Earth-orbit for ionospheric and thermospheric investigations. Applications, mass, power, and cost will be discussed.